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发明名称
DEVICE SIMULATOR
摘要
申请公布号
JPH01268141(A)
申请公布日期
1989.10.25
申请号
JP19880097767
申请日期
1988.04.20
申请人
FUJITSU LTD
发明人
OSHIDA SUMIKO
分类号
H01L21/66;G06F17/50;H01L21/822;H01L27/04;H01L27/10;H01L29/00
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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