| 发明名称 |
Light filters for microelectronics |
| 摘要 |
Filters suitable for microelectronic uses and the like may be prepared directly on substrates either as monolithically integrated filters or as hybrid filters using a soluble dye material in a resin. The resin may be applied to microelectronic substrates and patterned by conventional microphotolithographic processes.
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| 申请公布号 |
US4876165(A) |
申请公布日期 |
1989.10.24 |
| 申请号 |
US19870002107 |
申请日期 |
1987.01.12 |
| 申请人 |
BREWER SCIENCE, INC. |
发明人 |
BREWER, TERRY L.;HAWLEY, DAN W.;LAMB, JAMES E.;LATHAM, WILLIAM J.;STICHNOTE, LYNN K. |
| 分类号 |
G03F1/00;C08G73/06;C09D5/00;C09D5/32;C09D179/08;G02F1/1335;G03F1/08;G03F1/10;G03F7/09;G03F9/00;H01L21/027 |
主分类号 |
G03F1/00 |
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