| 摘要 |
PURPOSE:To improve the reliability of strength and thereby facilitate manufacture by providing a structure in which a thin resistance layer or a thin electrode layer is held between first and second substrates. CONSTITUTION:A comb-like electrode 12 is formed on the lower surface of a first substrate 11 and functions as a common electrode. The tip edge of the electrode is aligned, with a uniform gap, in parallel with the edge 11a of the first substrate 11. A second substrate 14 is arranged on the comb-like electrode 12 side against the first substrate 11, and a plurality of parallel electrodes 15 are formed alongside the parallel electrode section of the comb-like electrode 12. The tip edge of the comb-like electrode is also provided in parallel with the edge 14a of the substrate 14. The first and second substrates 11, 14 are assembled in such a manner that they hold a resistor 17 with the electrodes in the vicinity of the tip edges of the comb-like electrode 12 and parallel electrodes 15. In the gap between the edges 11a, 14a, a resistance material 18 is filled to interpolate the resistor 17. In addition, the edge sections of the substrates 11, 14 and the resistance material 18 are covered with insulative synthetic resin as a protective layer. If a voltage is applied to the parallel electrode 15, the resistance material generates heat to allow thermal transfer. |
