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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01265564(A)
申请公布日期
1989.10.23
申请号
JP19880094357
申请日期
1988.04.15
申请人
KAWASAKI STEEL CORP
发明人
TADA YOSHIHIDE
分类号
H01L21/336;H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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