| 摘要 |
PURPOSE:To enable production of a group IVa, Va or VIa metal carbide at a low temperature and industrially and advantageously obtain a raw material for super hard members, by using a plasma of a carbon source gas. CONSTITUTION:A powder, compact, calcined compact, etc., of a group IVa, Va or VIa metal (preferred examples are respectively Ti, Ta and W) or a composite material (preferably alloy in a state of slid solution) is reacted with a gas obtained by exciting a carbon source gas, preferably a gas prepared by exciting a carbon source gas of CO and H2 in combination by various plasma decomposition methods, normally at 400-1,200 deg.C, preferably at 450-1,200 deg.C under 10<-5>-10<3>, preferably 10<-3>-10<3>Torr pressure to afford a carbide. |
