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发明名称
METHOD FOR FORMING HIGH DENSITY DIELECTRIC ISOLATION
摘要
申请公布号
EP0071205(B1)
申请公布日期
1989.10.18
申请号
EP19820106656
申请日期
1982.07.23
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CHU, WEI-KAN;PLISKIN, WILLIAM AARON;RISEMAN, JACOB
分类号
H01L21/76;H01L21/31;H01L21/3105;H01L21/316;H01L21/762
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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