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发明名称
METHOD AND DEVICE FOR VACUUM DEPOSITION
摘要
申请公布号
JPH01255663(A)
申请公布日期
1989.10.12
申请号
JP19880081905
申请日期
1988.04.01
申请人
KOBE STEEL LTD
发明人
TAMAGAKI HIROSHI
分类号
C23C14/24;C23C14/22
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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