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发明名称
FORMING METHOD FOR MULTILAYER INTERCONNECTION
摘要
申请公布号
JPH01255250(A)
申请公布日期
1989.10.12
申请号
JP19880083848
申请日期
1988.04.05
申请人
FUJITSU LTD
发明人
TANIGUCHI TOSHIO;MIZUTANI TAKAHIKO
分类号
H01L21/768
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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