| 摘要 |
PURPOSE:To facilitate the taping work of a backing tape, by retaining a pair of vacuum boxes in the manner in which their surfaces face each other, and opening and shutting are enabled, and constituting two vacuumizers which are independently controllable. CONSTITUTION:On one sucking surface A, a green sheet 6 is arranged, and a vacuumizer 21a connected with the sucking surface A is operated, and then the green sheet 6 is fixed on the sucking surface A. Next, by closing an opening and shutting part, the sucking surface A is covered with the other sucking surface B; the vacuumizer 21b of the sucking surface B is operated, and, at the same time, the vacuumizer 21a is interrupted; then the green sheet 6 is sucked by the sucking surface B. When the openinging and shutting part 5 is opened, the green sheet 6 is transferred from the sucking surface A to the sucking surface B. At this time, the green sheet 6 is obtained in the state in which the sucking surface A is turned over. Thereby, the surface or the rear of the green sheet 6 is easily exposed, so that sticking a backing tape on the surface or exfoliating it from the surface is enabled. |
