| 摘要 |
<p>PURPOSE:To eliminate the necessity of preparing a humidity sensor and dew sensor separately from each other from the title element so as to reduce the cost and simplify the assemblage and maintenance of the element by forming a humidity sensor and dew sensor sections on the same ceramic base plate. CONSTITUTION:A humidity sensor section 10 and dew sensor section 11 are formed on the same surface of a ceramic base plate 1 of alumina, etc. The humidity sensor section 10 is constituted by providing a pair of comb type electrodes 2 and 3 of Ag/Pd conductor pattern films at a small interval, with a humidity sensible film 4 being formed between the electrodes 2 and 3. The dew sensor section 11 is constituted of parallel electrodes 12 and 13 which are the extentions of the electrodes 2 and 3 of the humidity sensor section 10, respectively, with a pair of resistance bodies 14 and 15 being formed between the electrodes 12 and 13. Thus the sensor sections 10 and 11 are electrically connected in parallel with each other. Therefore, humidity measurement can be performed in at least a normal humidity range of about 30-80% by one element only and, at the same time, a dew forming state can be detected also.</p> |
