| 摘要 |
PURPOSE:To enable the improvement of a device in a frequency property and realize the device provided with a high speed response by a method wherein a bonding pad is eliminated to make an equivalent CR time constant of a photodetecting element small. CONSTITUTION:A photodetecting element 1 is provided with a semiconductor substrate 10 where pn junction regions 13, 15, and 16 are formed at prescribed positions, a first electrode 11 formed into a ring shape at, a position on one side of the semiconductor substrate 10 corresponding to the pn junction regions, and a second electrode 12 on the other side of the substrate 10. Moreover, a ring-shaped rigid insulator 2 is provided with a recess 4 on one side whose base 4a, at least, is covered with a conductive material, a hole 3 which extends from the base 4a and penetrates the other side, a first lead wire 5 connected to the base 4a ot the recess 4, and a second lead wire 6 provided as insulated from the lead wire 5. The photodetecting plane of the photodetecting element 1 receives an optical output from the outside through the hole 3 and an electrical output is taken out from the first and the second lead wire, 5 and 6, corresponding to the optical input.
|
