| 摘要 |
PURPOSE:To prevent an erroneous inspection and the damage of a pellet in a minimum delay time by a method wherein, when the contact of a bonding tool with the pellet is detected, a strain of an ultrasonic horn is detected by using a strain sensor and this strain is compared with a reference value which has been set in advance. CONSTITUTION:An ultrasonic horn 5 equipped with a bonding tool 4 at its tip protrudes and is installed at a tip part of an arm 1 of a wire bonding apparatus. A motor 7 is interconnected at the back of the arm 1; the bonding tool 4 and a lower clamber 6 can be turned backward and forward in the upper and lower directions. A strain sensor 10 is installed at a support plate 3; it is possible to detect a strain which is caused at the ultrasonic horn 5 when the bonding tool 4 comes into contact with a pellet 9. This strain is output to a comparator 12 through an amplifier 11; the comparator 12 compares an output from the strain sensor 10 with a reference value which has been set in advance. On the basis of this information, the motor 7 is controlled and corrected; a good bonding operation corresponding to a height of the pellet 9 can be executed. |
