| 发明名称 |
Passivation of group III-V surfaces |
| 摘要 |
A method of passivating a Group III-V compound surface by exposing the surface to a compound A-B, wherein A is an element having a heat of oxide formation greater than the heats of oxide formation of Group III and V elements and B is an element: S, Se, Te or Po.
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| 申请公布号 |
US4871692(A) |
申请公布日期 |
1989.10.03 |
| 申请号 |
US19880251521 |
申请日期 |
1988.09.30 |
| 申请人 |
LEE, HONG H.;LEE, SANG H. |
发明人 |
LEE, HONG H.;LEE, SANG H. |
| 分类号 |
H01L21/314;H01L21/56 |
主分类号 |
H01L21/314 |
| 代理机构 |
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代理人 |
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| 主权项 |
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