CERAMIC TARGET FOR SPUTTERING

摘要

PURPOSE:To form a ceramic target preventing the cracking and chipping of the ceramic and enabling stable sputtering by sticking many roundish ceramic polyhedrons on a backing plate. CONSTITUTION:Many roundish ceramic polyhedrons 1 are stuck on a copper backing plate 3 with an adhesive 2. Since the ceramic polyhedrons 1 having no points are used, an electric field or stress does not concentrate and a target preventing the chipping and cracking of the ceramic edge during sputtering is obtd. By using the target, a thin film free from defects is formed at a high rate.