| 摘要 |
PURPOSE:To accurately obtain an evaluation value even if a defect having the same density gradation as that of the surface of a substance to be inspected exists by calculating the evaluation value of inspection capacity based on the 1st detection probability, the 2nd appearance probability and distribution probability. CONSTITUTION:The 1st detection probability of an appearance inspector and the 1st appearance probability of a defect on the surface of a substance to be inspected are respectively calculated in each feature value of an image expressing the feature of the image of the substance to be inspected. Then the 2nd inspection probability of the appearance inspector and the 2nd appearance probability of the defect are found out in each degree of the image expressing the feature of the image of the substance to be inspected and the distribution probability in the degree of a feature value other than the degree of the feature value included in the image data of the substance to be inspected is calculated based on the 2nd detection probability and the 2nd appearance probability. The evaluation value of inspection capacity is calculated based on the 1st detection probability, the 1st appearance probability and the distribution probability. Even if a defect having the density gradation as that of the surface of the substance to be inspected exists, the evaluation value can be accurately obtained. |
