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发明名称
摘要
申请公布号	JPH01142881(U)	申请公布日期	1989.09.29
申请号	JP19880040920U	申请日期	1988.03.28
申请人		发明人
分类号	G01R1/06;G01R31/28;G01R31/302;H01L21/66;(IPC1-7):G01R31/28	主分类号	G01R1/06
代理机构		代理人
主权项
地址

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