| 摘要 |
PURPOSE:To prevent mistaking the direction of a device pattern by providing a pattern for identifying a shape which can identify the top, bottom, right, and left of the device pattern in combination with the device pattern. CONSTITUTION:The pattern 4 for identification is disposed with a device pattern region 5. The reticle 1 is set in a normal direction by viewing the pattern 4 for identification and checking the top, bottom, right, and left of the device pattern 3 at the time of setting the reticle 1 to a reduction stepper. The accident of mistaking the direction of the pattern transfer in such a case in which plural enterprises cooperatively produce, for example, semiconductor devices is thereby prevented. |
