| 摘要 |
PURPOSE:To prevent the deterioration of interface characteristics, and improve element characteristics, by installing, in the vicinity of a grid, a shutter whose potential is kept equal to the grid, and which is maintained in a closed state until glow discharge is stabilized, and turned into an open state after the glow discharge has been stabilized. CONSTITUTION:A grid 8 is arranged between a cathode 2 and an anode 3, and grounded. A shutter 10, which is arranged in the vicinity of the grid 8 and grounded, is provided with a plurality of thin metal plate 11 of continuous length in a rectangular direction to each wire 9. The shutter 10 is closed; high frequency voltage is applied between the cathode 2 and the grid 8 by a power supply 6; RF glow discharge is generated between the cathode 2 and the grid 8. After the discharge is stabilized, the shutter is opened, and a thin film is formed on the substrate 4. Thereby high energy particles are prevented from colliding against the substrate 4, so that the deterioration of film quality can be prevented. |
