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发明名称
VERFAHREN ZUR HERSTELLUNG VON SILICIUMHALTIGEN NEGATIVRESISTBILDERN
摘要
申请公布号
DD272141(A1)
申请公布日期
1989.09.27
申请号
DD19870307660
申请日期
1987.10.05
申请人
AKADEMIE DER WISSENSCHAFTEN DER DDR,DD
发明人
MUELLER,SIEGFRIED,DD;WAESCHE,MANFRED,DD;BEYER,WOLFRAM,DD
分类号
G03F7/26;(IPC1-7):G03C1/68
主分类号
G03F7/26
代理机构
代理人
主权项
地址
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