发明名称 PRODUCTION OF FINE PARTICLE AND DEVICE THEREFOR
摘要 PURPOSE:To control the expansion of a raw gas and to confine the reaction region within an extremely limited volume region by supplying the raw gas into the rectilinearly moving laser beam or into the laser beam at a position where the raw material is brought into contact with the beam. CONSTITUTION:A penetrating hole forming member 20 has a penetrating hole 21 opened at both ends, and a parallel laser beam 11 emitted from a laser beam source 10 provided outside a reaction chamber 12 or appropriately a laser beams 11' converged by a convergent lens system 23 is passed through the hole 21. The converged laser beam 11' leaving the hole 21 is injected into a laser energy absorber 17 made from a carbon plate, and absorbed therein. A raw gas supply passage 14 entering the reaction chamber 12 further pierces the thick part of the member 20, and the tip is opened on the inner wall surface of the hole 21.
申请公布号 JPH01242143(A) 申请公布日期 1989.09.27
申请号 JP19880068852 申请日期 1988.03.23
申请人 AGENCY OF IND SCIENCE & TECHNOL 发明人 KIMURA SHINJI;OKAJI YOSHITAKA
分类号 C01B21/068;B01J19/12;C01B21/076;C01B31/30;C01B31/36 主分类号 C01B21/068
代理机构 代理人
主权项
地址
您可能感兴趣的专利