| 摘要 |
<p>A preferred embodiment of a resonator according to the invention comprises essentially a resonating plate (1), an action electrode (2) and a detection electrode (3), and a support (6). The electrodes are arranged facing symmetrical edges of the plate, opposite vibrational antinodes, and are coupled to the plate by a capacitive, electrostrictive or piezoelectric effect depending upon the material constituting the plate. A very wide range of solid elastic materials can be used to construct the resonating plate. The plate is fixed to the support at points (511, 512, 521, 522) corresponding to the vibrational nodes of the plate. Advantageously, the plate vibrates in an outline mode called the Lamé mode. High quality factors of the order of 10<7> are obtained. The resonators according to the invention can readily be integrated. For this purpose, the plate is, for example, made of silicon.</p> |
