发明名称 SEMICONDUCTOR MEMORY AND ITS MANUFACTURE
摘要 PURPOSE:To obtain a product which is capable of higher-scale integration and can be supplied to users in a short period by designing a semiconductor memory which stores two-value information corresponding to threshold voltages of a MOS transistor, in such a way that two-kind gate lengths of the transistor are provided according to the two-value information and two-kind threshold voltages are set according to the lengths. CONSTITUTION:A semiconductor memory which stores two-value information according to the threshold voltages of a MOS type transistor is so constituted that two-kind gate lengths of a transistor are provided according to the two- value information and two-kind threshold voltages are applied according to it. For example, the gate length of a memory cell to store '1' is made long and that of a memory cell to store '0' is made short by using the mask for program as a mask for gate pattern. And after LOCOS processing, a gate oxide film is formed and then by polysilicon or silicide, a gate layer is formed and using said mask, a word pattern as shown in the drawing is formed. Thereafter, diffusion layers 13-16 of source drain are formed by self alignment with the gate as a mask.
申请公布号 JPH01239878(A) 申请公布日期 1989.09.25
申请号 JP19880066383 申请日期 1988.03.19
申请人 FUJITSU LTD 发明人 HIROTA JUNKO
分类号 G11C17/12;G11C17/00;H01L21/8246;H01L27/10;H01L27/112 主分类号 G11C17/12
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