THIN FILM FORMING DEVICE,申请号JP19880066869-传众专利搜索

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发明名称	THIN FILM FORMING DEVICE
摘要
申请公布号	JPH01239851(A)	申请公布日期	1989.09.25
申请号	JP19880066869	申请日期	1988.03.18
申请人	CANON INC	发明人	SUZUKI NOBUMASA;YOSHIKAWA TOSHIAKI
分类号	C23C16/48;C23C16/50;H01L21/205;H01L21/31	主分类号	C23C16/48
代理机构		代理人
主权项
地址

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