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发明名称
SEMICONDUCTOR TREATING EQUIPMENT
摘要
申请公布号
JPH01238022(A)
申请公布日期
1989.09.22
申请号
JP19880064609
申请日期
1988.03.17
申请人
MARINE INSTR CO LTD
发明人
FURUKAWA HARUHIKO
分类号
H01L21/304;B01D46/42;H01L21/306
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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