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发明名称
PATTERN GENERATOR FOR SEMICONDUCTOR INTEGRATED CIRCUIT TESTER
摘要
申请公布号
JPH01235874(A)
申请公布日期
1989.09.20
申请号
JP19880063937
申请日期
1988.03.16
申请人
ADVANTEST CORP
发明人
HIRAKATA YOSHIHARU
分类号
G01R31/3183;G01R31/28;G11C29/00;G11C29/10;H01L21/66
主分类号
G01R31/3183
代理机构
代理人
主权项
地址
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