发明名称 Method and apparatus for calibrating artwork from a direct imaging system
摘要 A novel method and apparatus for determining the accuracy of artwork produced from a laser direct imaging system employs a calibration substrate which has images of opposed, perpendicular scales and registration marks thereon. The overall system dimensional error is determined directly from substrate measurements, as is the magnitude of the mechanical and processing errors.
申请公布号 US4867566(A) 申请公布日期 1989.09.19
申请号 US19880164519 申请日期 1988.03.07
申请人 THE GERBER SCIENTIFIC INSTRUMENT COMPANY 发明人 STRAAYER, RONALD J.;TIMMONS, JR., RAYMOND E.
分类号 G03F9/00;G01B11/02;G01B11/03;G03F7/20;H01L21/027 主分类号 G03F9/00
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