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发明名称
AETZSCHABLONE ZUR HERSTELLUNG EINES ABGEDUENNTEN GEBIETES IN EINER SILIZIUMSCHEIBE
摘要
申请公布号
DD150376(A1)
申请公布日期
1981.08.26
申请号
DD19800220800
申请日期
1980.04.30
申请人
GUELDENPFENNIG,UWE,DD;LOEFFLER,FRANK,DD;ZUNFT,DORIT,DD
发明人
GUELDENPFENNIG,UWE,DN;LOEFFLER,FRANK,DD;ZUNFT,DORIT,DD
分类号
C23F1/02;H01L21/308;H01L41/22;(IPC1-7):H01L21/308
主分类号
C23F1/02
代理机构
代理人
主权项
地址
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