| 摘要 |
PURPOSE:To maintain superior optical characteristics, such as intensification of contrast by far ultraviolet rays of specified wavelength and to facilitate operation by forming the photodecolorizable layer comprising an alpha-diazocarbonyl derivative as a photodecolorizable dye and a rosin as a binder. CONSTITUTION:The photodecolorizable layer is formed by using the alpha- diazocarbonyl derivative as the photodecolorizable dye and one of the rosins as the binder. The pattern is formed by coating a substrate 21, such as a film- coated silicon base plate or GaAs base plate, with a resist 22, spin coating the resist 22 directly with the photodecolorizable layer 23, exposing the layer 23 through a photomask 24 to ultraviolet rays of 190-250nm wavelengths, and finally developing the layer 23 and the layer 22 at the same time by using an alkaline solution, thus permitting the obtained photodecolorizable layer to be adapted in optical characteristic to the prescribed wavelength rays, and capable of executing direct development and simplifying manufacturing processes, and the material of said layer 23, and the method for forming the pattern to be ensured. |
