| 摘要 |
PURPOSE:To detect the positions of a chemical composition, adsorbed atoms, or adsorbed molecules on the surface of a sample in the resolution less than the size of the atom by counting Auger electrons emitted from the sample by the radiated electron beams at every energy respectively. CONSTITUTION:The Auger electron 11 emitted from the surface of a sample by the electron beam 10 is detected by a detector 12, and counted by a counter 13, to find the sort of the chemical composition on the the surface of the sample, or adsorbed atoms or molecules on the surface. A voltage is applied from a voltage source 5 between a scanning needle 3 and the sample 2, the current flowing between the scanning needle 3 and the sample 2 is measured by an amperemeter 6, and the scanning is carried out by a scanning device 4 while the height of the scanning needle 3 is converted by a device 7 to maintain the tunnel current constant. By measuring the variation of the height of the scanning needle 3 by a device 8 to measure the variation, the structure of the sample surface, the position of the adsorbed substance, and the like can be found at the resolution less than the size of the atm. |
