| 摘要 |
<p>PURPOSE:To improve the operation rate of a semiconductor producing device and to improve the yield of a semiconductor by providing the title device with a means for generating an alarm when an error more than a prescribed value is generated and stopping the operation of a processing part when another error more than the prescribed value is generated. CONSTITUTION:During the baking processing of a wafer 4, a stage 3 is always monitored at its temperature state by a temperature monitor 13. The temperature state outputted from the monitor 13 is compared with a required heating temperature by a control means 11, and when its temperature error is >=5 deg.C, the control means 11 drives an alarm means 12 to display an alarm. When the detected temperature error is >=10 deg.C, the control means 11 drives the alarm means 12 and turns off a power supply switch 10 to stop the heating of the stage 3.</p> |
