| 摘要 |
PURPOSE:To provide a substrate excellent in heat insulating properties and prevented from becoming high temp. locally and instantaneously, by constituting the heat accumulating layer formed on an insulating substrate of a polyimide resin layer and the titanium oxide layer formed thereon. CONSTITUTION:A titanium alkoxide solution is prepared by a method wherein tetraethoxytitanium [Ti(OC2H5)4] is disolved in ethanol and distilled water is added to the resulting solution to perform reflux for 10hr and the resulting reaction mixture is allowed to stand for a day at room temp. Next, a polyimide coating agent is applied to an alumina substrate (insulating substrate) 1 to form a polyimide resin layer 3 and the above mentioned prepared solution is applied to said polyimide resin layer 3 by spin coating and, after drying, the coating layer is baked at 300 deg.C for 30min. This process is repeated 10 times to form a titanium oxide layer 4 having a thickness of 1mum. Further, a Ta2N layer is formed on the titanium oxide layer 4 by sputtering and an aluminum alloy is vapor-deposited on said layer 5 to be patterned into conductors 6a, 6b and a SiO2 layer 7 is further formed thereon to constitute a thermal head. |
