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发明名称
COMPOUND SEMICONDUCTOR GASEOUS PHASE EPITAXIAL APPARATUS
摘要
申请公布号
JPH01224296(A)
申请公布日期
1989.09.07
申请号
JP19880047554
申请日期
1988.03.02
申请人
SUMITOMO ELECTRIC IND LTD
发明人
YAJIMA KUNIMITSU;MATSUSHIMA MASATO
分类号
C30B25/14;H01L21/205
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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