| 摘要 |
PURPOSE:To improve the environmental resistance of the recording medium and to prolong the life thereof by executing reactive sputtering of a Te target in an atmosphere essentially consisting of gaseous N2, thereby forming a protective film on a recording film. CONSTITUTION:A gaseous mixture composed of gaseous hydrocarbon and gaseous argon is introduced into a vacuum vessel 1 and a voltage is impressed between the AgTe eutectic alloy target 4 and a counter electrode 7 to deposit and form the recording film 61 on a substrate 6 by the reactive sputtering. The gaseous hydrocarbon and the gaseous argon are then discharged and gaseous nitrogen and gaseous argon are introduced in place thereof into the vacuum vessel, then the sputtering is executed to form a protective layer 62 consisting of the TN time. The environmental resistance is thereby improved and the life is prolonged. |
