| 摘要 |
PURPOSE:To eliminate the use of air and to perform an accurate alignment and the correction of a magnification error by employing, as a guide for scanning of an exposure system, a superconduction magnetic levitation guide using a superconduction magnet and a coil. CONSTITUTION:Superconduction magnets 9a-9f are provided on upper and lower, and right and left sides of the guide rail 6b of a guide 6, and superconduction coils 8a-8f are provided on a slide member 6a slidable on the rail 6b. On the other hand, superconduction magnets 9g, 9h are provided above and below the guide rail 7b of a guide 7, and superconduction magnets 8g, 8h are provided at a slide member 7a, thereby levitating the slide member by the repulsion of the magnets when the coil secured to the member 6a is conducted. The current flowing in the coils of the guide 6 is controlled to alter the levitation forces, thereby arbitrarily altering a gap set. Thus, the attitude and position of a coupler 5 are driven in a small area. When the attitude and position of the coupler 5 are adjusted, a mask 1 can be accurately projected to a desired position of a wafer 3. |
