| 摘要 |
PURPOSE:To improve the stability of a multistation processing system by providing a 2theta angle adjusting mechanism to a first beam switching mechanism and installing a beam position sensor, beam profile monitor and power meter near to the final beam switching mechanism. CONSTITUTION:The laser beam 13 emitted from a transmitter 2 passes through the beam switching mechanisms 3, 5, 6, 7 and the beam position is detected by a thermocouple type beam position detector 8. The detection signal is controlled by a beam position control box 12 which drives a reflecting mirror 4 with the 2theta angle adjustment of the beam switching mechanism 3 to control the laser beam in such a manner that said beam is brought to the center of the beam position detector 8. The detection signal of the beam profile monitor 9 passes through a resonator alignment control box 11 and is fed back to the resonance alignment 11 to correct the mode if abnormality is judged. Further, the detection signal of the power meter 10 is fed back to a power supply 1 and the stable laser beam 13 is taken out to operate the respective beam splitting/switching mechanisms so that the beams are transmitted to the respective processing stations if said signal is defective in power with respect to the set value. |
