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发明名称
LINEAR GUIDE
摘要
申请公布号
JPH01216120(A)
申请公布日期
1989.08.30
申请号
JP19880039024
申请日期
1988.02.22
申请人
TOKYO ELECTRON LTD
发明人
OSADA HATSUO
分类号
B23Q1/26;B23Q1/38;F16C29/00;F16C29/12;F16C32/06;H01L21/66
主分类号
B23Q1/26
代理机构
代理人
主权项
地址
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