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发明名称
OPTICAL DEFECT INSPECTOR
摘要
申请公布号
JPH01214744(A)
申请公布日期
1989.08.29
申请号
JP19880335676
申请日期
1988.12.28
申请人
ERWIN SICK GMBH OPT ELEKTRON
发明人
KAARU PIITSUSHIE
分类号
G01N21/89;G01N21/892;G01N21/896;G01N21/95;G01N21/958
主分类号
G01N21/89
代理机构
代理人
主权项
地址
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