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发明名称
GROWTH OF III-V GROUP COMPOUND SEMICONDUCTOR CRYSTAL ON SI SUBSTRATE
摘要
申请公布号
JPH01212296(A)
申请公布日期
1989.08.25
申请号
JP19880036861
申请日期
1988.02.19
申请人
NEC CORP
发明人
MATSUMOTO TAKU
分类号
C30B25/18;C30B29/40;H01L21/205
主分类号
C30B25/18
代理机构
代理人
主权项
地址
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