PLASMA CVD DEVICE,申请号JP19880037822-传众专利搜索

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发明名称	PLASMA CVD DEVICE
摘要
申请公布号	JPH01212432(A)	申请公布日期	1989.08.25
申请号	JP19880037822	申请日期	1988.02.20
申请人	FUJITSU GENERAL LTD	发明人	TSUKADA MASASHI
分类号	H01L21/205;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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