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发明名称
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE THEREOF
摘要
申请公布号
EP0139019(B1)
申请公布日期
1989.08.23
申请号
EP19840901232
申请日期
1984.03.26
申请人
HITACHI, LTD.
发明人
IKEDA, TAKAHIDE;WATANABE, ATSUO;MUKAI, TOUJI;ODAKA, MASANORI;OGIUE, KATSUMI
分类号
H01L29/78;H01L21/331;H01L21/74;H01L21/8249;H01L27/06;H01L29/73
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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