| 摘要 |
PURPOSE:To miniaturize the title device and to simplify a pattern inspection by installing an object to be inspected so that the object can be adhered closely to a transparent window, moving a photographing means in parallel to the transparent window while illuminating the transparent window from the internal part of a case, and photographing a two-dimensional picture. CONSTITUTION:A rectangular case 26 has a transparent window 27 on its upper surface, and a picture processor 28, a photographing device 31, and a scanning mechanism 32 are housed in the case. The device 31 can be moved in (x) and (y) directions by the mechanism 32 driven by a motor 33. Further, a camera 29 and an illuminating device 30 are unified in the device 31, and the device 31 illuminates only a part to be photographed. A printed wiring board 10, which is the object to be inspected, is loaded on the window 27 at the upper part of the case 26, and the pattern is photographed by the device 31. The photographed picture is processed by the processor 28. Thus, the device can be miniaturized, and the photographing and the inspection of the pattern of the object to be inspected can be simplified. |
