| 摘要 |
PURPOSE:To improve various characteristics such as compactness, thermal conductivity, insulating characteristic, and dielectric constant by specifying the contents of the group IIIa element and oxygen in a sintered aluminum nitride body. CONSTITUTION:The sintered body which consists essentially of AlN, contains 0.01-1.0wt.% elements of the group IIIa of the periodic table such as Y of rare earth elements and >=180W/mK thermal conductivity is made into the above sintered body. The 2nd phases of <=1mu thickness exist interspersedly among the AlN particles of this sintered body and C is incorporated at 0.001-0.1% in the grain boundary part (the ratio to the rare earth element is 1/100-10). This sintered body is obtd. by mixing a prescribed ratio of the stearate of the group IIIa element with AlN powder and molding the mixture, then sintering the molding in a nonoxidizing nitrogenous atmosphere at 1,500-2,000 deg.C. This sintered body constitutes a high-thermal conductivity ceramics package when a conductive paste is formed on the surface of said body and the body is combined with a circuit board, semiconductor element and lead frame. |
