EVALUATING METHOD FOR CLEAN ROOM,申请号JP19880029294-传众专利搜索

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发明名称	EVALUATING METHOD FOR CLEAN ROOM
摘要
申请公布号	JPH01203943(A)	申请公布日期	1989.08.16
申请号	JP19880029294	申请日期	1988.02.10
申请人	FUJITSU LTD;FUJITSU VLSI LTD	发明人	YONETSUKA HISAO;FUJIE NOBUO;KOMATSU KAZUNARI
分类号	G01N15/06;F24F7/06	主分类号	G01N15/06
代理机构		代理人
主权项
地址

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