发明名称 |
Sensor for determining photoresist developer strength |
摘要 |
An optical analyzer and a developer recirculation system is used to determine the amount of photoresist polymer dissolved in a quantity of developer solution and the sensor output signal is utilized by a control computer to control the admission of fresh developer solution to replace used developer and maintain a fixed level of dissolved photoresist polymer to keep the developer bath at a fixed level of chemical activity.
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申请公布号 |
US4857750(A) |
申请公布日期 |
1989.08.15 |
申请号 |
US19870134438 |
申请日期 |
1987.12.17 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
MILLIS, EDWIN G.;WOOD, JR., SAMUEL J. |
分类号 |
G01N21/33;G01N21/85;G03F7/30;G05D21/02 |
主分类号 |
G01N21/33 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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