Transfer vessel device and method of transfer using the device

摘要

A transfer vessel device for transporting a specimen between two vacuum apparatuses while maintaining the specimen under a high vacuum. The device comprises a hermetic container for accommodating a specimen removed from a vacuum apparatus and for supporting the specimen; a heat-insulated container in which a cooling medium such as liquid nitrogen is accommodated; and a heat-transfer member which is formed of a highly heat conductive material such as copper and which surrounds the specimen in the hermetic container and has one end leading into the heat-insulated container so as to be cooled by the cooling medium.