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发明名称
MOLECULAR BEAM EPITAXIAL GROWTH SYSTEM
摘要
申请公布号
JPH01201915(A)
申请公布日期
1989.08.14
申请号
JP19880026022
申请日期
1988.02.05
申请人
MITSUBISHI ELECTRIC CORP
发明人
SONODA TAKUJI;HAYASHI KAZUO
分类号
H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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