| 摘要 |
PURPOSE:To increase the life of the device by disposing an ultraviolet ray emission lamp at positions that can irradiate a discharge space. CONSTITUTION:When an ultraviolet ray emission lamp 21 is lighted by a lamp drive power supply 22 prior to the charging of a charging capacitor 13, an ultraviolet ray 15 irradiates a discharge space 16, and a laser gas is ionized. In an oscillating power supply circuit 2, when a main capacitor is charged by a high-voltage power supply 4 via a charging resistance 5, it increases in accordance with its time constant, causing the switch 6 to close and a discharge current to flow through an inductance 8. The charges of the main capacitor 7 moves to the charging capacitor 13, and the potential between the anode 11 and the cathode 12 increases, thus generating a discharge in the discharge space 16. As the laser gas in the discharge space 16 has been ionized, the discharge becomes a glow discharge. This makes it possible to obtain a device that is small, having a long life, and for which repeated operation is possible. |
