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发明名称
PRODUCTION OF SUPERCONDUCTOR LAYER
摘要
申请公布号
JPH01201007(A)
申请公布日期
1989.08.14
申请号
JP19880024187
申请日期
1988.02.04
申请人
FUJITSU LTD
发明人
BOKU YOSHIHIRO
分类号
H01L39/24;C01B13/14;C01G1/00;C01G3/00;C23C24/08;C23C26/00;H01B13/00
主分类号
H01L39/24
代理机构
代理人
主权项
地址
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