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发明名称
DEVICE FOR FORMING FUNCTIONAL DEPOSITED FILM BY MICROWAVE PLASMA CVD
摘要
申请公布号
JPH01198484(A)
申请公布日期
1989.08.10
申请号
JP19880021918
申请日期
1988.02.03
申请人
CANON INC
发明人
FUJIYAMA YASUTOMO
分类号
C23C16/24;C23C16/50;C23C16/511;H01L21/205;H01L31/0248;H01L31/08
主分类号
C23C16/24
代理机构
代理人
主权项
地址
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