| 摘要 |
PURPOSE:To provide excellent characteristics such as high sensitivity, high dry etching resistance, non-swellability, and high heat conductive characteristic to the resist compsn. by dispersing particles of carbon subjected to a fluorination treatment into a binder. CONSTITUTION:The carbon subjected to the fluorination treatment is incorporated into the resist compsn. The fluorine of the carbon fluoride in an exposed part is liberated and is returned to the carbon when energy rays such as EB, X-rays or ion beams are selectively projected on said part. A latent image is, therefore, formed by the exposed part and the unexposed part and a fine pattern is obtd. by developing said image. The particles of the carbon subjected to the fluorination treatment can be obtd. by subjecting superfine powder of graphite, etc., to the fluorination treatment. The grain size of the particles is preferably about 0.05mum or below. |
